IET Malaysia presents:
MEMS based Chemical Sensors for Biomedical Applications More Events
Speaker:
Prof. Dr. Burhanuddin Yeop Majlis
Date/Time:
Tuesday 18th August 2020 @ 3:30 PM Local time (UTC +8 hours)
Venue:
Online Webinar
Details:
"Elements to be detected are guided into microfluidic channels using MEMS micropumps. The micro chamber and the fluidic channel were fabricated using standard photolithography and soft lithography process. Conventional method by pouring PDMS on a silicon wafer and peeling after curing in soft lithography produces unspecific layer thickness. In the micropump, planar valveless design is used. The technique utilizes MEMS fabrication methods by using a double sided etch."
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